Multimethod Analysis with Cathode Lens Electron Microscopy

Ernst Bauer, Arizona State University

Cathode lens electron microscopes (CLEM) allow today so may complementary analysis methods and experimental facilities that they can be used as a full-fledged surface and thin film analysis laboratory. Little use has been made up to now because most instruments are dedicated to specific problems, which require only one or a few of these methods. Only in a few user facilities such a s synchrotron radiation centers this potential of CLEM is used presently and these instruments are overbooked. Developments of laboratory X-ray sources should allow in the future to overcome this problem. The lecture will discuss the present situation and speculate about future possibilities.